Turnkey

Canon FPA-3000 i5/ i5+ stepper.

• Wafer size: 8” to 3”, Notch or Flat type.
• Reticle size: 6”or 5”
• Magnification: 1/5
• Illumination System: 2.0kV or 2.7kV
• Alignment Source: i-Line
• X-Y Stage
• Auto Focus
• Wafer Leveling
• TV-Pre-alignment
• Wafer Auto Feeder
• Reticle Changer
• Option:
  • Reticle Barcode reader
  • Pellicle Particle Checker
  • Chuck Maintenance Tool
  • Triple HD or Dual HD