Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
? Novellus: Concept One (C1D, C1W)
? Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
? Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 0710-739462 | CMP | Speedfam | BELT,960MM PITCH HI SPEED | New OEM | Contact Us |
| 0710-739471 | CMP | Speedfam | PULLEY, W/2 FLATS UPPER BRUSH | New OEM | Contact Us |
| 0710-739494 | CMP | Speedfam | CLAMP,ADPTR BEARING | New OEM | Contact Us |
| 0710-739691 | CMP | Speedfam | KEY,SQUARE PARALLEL 1/8 X 1/8 | New OEM | Contact Us |
| 0710-739742 | CMP | Speedfam | PULLEY,8MM X 64 TOOTH | New OEM | Contact Us |
| 0710-739996 | CMP | Speedfam | COUPLING,HELICAL 1"X2.2"X10MMX10MM | New OEM | Contact Us |
| 0710-770575 | CMP | Speedfam | SPRING, .032 X.30 OD X .05H SST | New OEM | Contact Us |
| 0710-771033 | CMP | Speedfam | HANDLE,SYSTEM STANDARD | New OEM | Contact Us |
| 0710-771034 | CMP | Speedfam | INSERT,LOCK PUSH BUTTON | New OEM | Contact Us |
| 0710-772061 | CMP | Speedfam | COUPLING,1/2 X 1/2 W/KEY | New OEM | Contact Us |
| 0720-103442 | CMP | Speedfam | BEZEL,372M MONITOR CURVED | New OEM | Contact Us |
| 0720-109071 | CMP | Speedfam | RING,CENTER CONTACT WAND | New OEM | Contact Us |
| 0720-109381 | CMP | Speedfam | MOUNT,NOSE BLOCK | New OEM | Contact Us |
| 0720-110256 | CMP | Speedfam | RING,GIMBAL SST | New OEM | Contact Us |
| 0720-111531 | CMP | Speedfam | BRKT,WAFER MAPPING COMB OUTSIDE | New OEM | Contact Us |
| 0720-111532 | CMP | Speedfam | BRKT,WAFER MAPPING COMB INSIDE | New OEM | Contact Us |
| 0720-700483 | CMP | Speedfam | RAIL,SLIDE SST | New OEM | Contact Us |
| 0720-700983 | CMP | Speedfam | RING,LIFTING SLURRY SHIELD | New OEM | Contact Us |
| 0720-717012 | CMP | Speedfam | BELL,WAFER HEAD | New OEM | Contact Us |
| 0720-717764 | CMP | Speedfam | CLIP, PAD COND TURRET MOUNTING LRG | New OEM | Contact Us |
| 0720-717767 | CMP | Speedfam | CLIP,PAD COND TURRET MOUNTING SMALL | New OEM | Contact Us |
| 0720-718327 | CMP | Speedfam | RING,STRP BUMPER ALUMINA WEAR 200MM | New OEM | Contact Us |
| 0720-727325 | CMP | Speedfam | SUPPORT,LEGS SPRAY BOX | New OEM | Contact Us |
| 0720-727373 | CMP | Speedfam | BELL,MOD POLISH | New OEM | Contact Us |
| 0720-727459 | CMP | Speedfam | SUPPORT,TAIL END EFFECTOR | New OEM | Contact Us |
| 0720-730015 | CMP | Speedfam | MOUNT, CYLINDER NOSE PAD CONDITIONER | New OEM | Contact Us |
| 0720-737507 | CMP | Speedfam | MOUNT, CYLINDER LWR BRUSH | New OEM | Contact Us |
| 0720-737666 | CMP | Speedfam | MOUNT, GEARHEAD | New OEM | Contact Us |
| 0720-737791 | CMP | Speedfam | MOUNT,WAFER CARRIER 316 SST | New OEM | Contact Us |
| 0720-738198 | CMP | Speedfam | STANDOFF,WAFER HOLDER | New OEM | Contact Us |
| 0720-738591 | CMP | Speedfam | LEG,LF BRKT UPPER ARM BALL SPLNE | New OEM | Contact Us |
| 0720-738592 | CMP | Speedfam | LEG,RT BRKT UPPER ARM BALL SPLNE | New OEM | Contact Us |
| 0720-738906 | CMP | Speedfam | RING, MOUNTING ROLLER 200MM/FLATS | New OEM | Contact Us |
| 0720-739665 | CMP | Speedfam | MOUNT,SNSR PAD COND MODIFIED | New OEM | Contact Us |
| 0720-739671 | CMP | Speedfam | MOUNT,BOTTOM BRUSH 200MM | New OEM | Contact Us |
| 0720-770043 | CMP | Speedfam | MOUNT,DWO SNSR | New OEM | Contact Us |
| 0720-7700443 | CMP | Speedfam | MOUNT,DWO SNSR | New OEM | Contact Us |
| 0720-770450 | CMP | Speedfam | BUTTON,EDGE | New OEM | Contact Us |
| 0720-770451 | CMP | Speedfam | BUTTON,776 CENTER | New OEM | Contact Us |
| 0720-770459 | CMP | Speedfam | MOUNT,WAND R2 | New OEM | Contact Us |
| 0725-730010 | CMP | Speedfam | Cap, Pad conditioner, 676/776/MV | New OEM | Contact Us |
| 0725-738892 | CMP | Speedfam | STRIP,RUBBER PAD COND BLADDERLESS | New OEM | Contact Us |
| 0725-790219 | CMP | Speedfam | CAP,WHITE | New OEM | Contact Us |
| 0730-105443 | CMP | Speedfam | SPACER,JACKING TOWER | New OEM | Contact Us |
| 0730-110224 | CMP | Speedfam | BUSHING,FLG 5/16ID 3/8OD 3/8LG T500 | New OEM | Contact Us |
| 0730-727009 | CMP | Speedfam | BUSHING,SPACER | New OEM | Contact Us |
| 0730-727318 | CMP | Speedfam | SPACER,SM PNEUMATIC PANEL | New OEM | Contact Us |
| 0730-737736 | CMP | Speedfam | INSERT,WAFER HD SST MYLAR | New OEM | Contact Us |
| 0730-738977 | CMP | Speedfam | BUSHING,FLANGED 1/4 X 3/8 | New OEM | Contact Us |
| 0730-739743 | CMP | Speedfam | BUSHING,QD SK 1"BORE NICKEL PLATED | New OEM | Contact Us |
| 0735-111651 | CMP | Speedfam | DIAPHRAGM,SLURRY EPDM | New OEM | Contact Us |
| 0735-717016 | CMP | Speedfam | DIAPHRAGM,WAFER HEAD FAIRPRENE | New OEM | Contact Us |
| 0735-718650 | CMP | Speedfam | DIAPHRAGM,WAFER HEAD 150MM | New OEM | Contact Us |
| 0740-100199 | CMP | Speedfam | BEARING,RADIAL 35 OD X 16 ID X 11 | New OEM | Contact Us |
| 0740-111269 | CMP | Speedfam | ROLLER,WAFER LARGE DIAMETER | New OEM | Contact Us |
| 0740-111382 | CMP | Speedfam | ROLLER, TYPE A | New OEM | Contact Us |
| 0740-700030 | CMP | Speedfam | BEARING,CROSS ROLLER | New OEM | Contact Us |
| 0740-700034 | CMP | Speedfam | BEARING,RULON 3/8 X 5/8 X 3/4 LG | New OEM | Contact Us |
| 0740-717634 | CMP | Speedfam | BEARING,KAYDON | New OEM | Contact Us |
| 0740-718396 | CMP | Speedfam | BEARING, HOIST 206PPG | New OEM | Contact Us |
| 0740-737577 | CMP | Speedfam | BEARING,20MM BORE 37MM OD 9MM WIDE | New OEM | Contact Us |
| 0740-738211 | CMP | Speedfam | ROLLER,TENSIONER UPPER ARM | New OEM | Contact Us |
| 0740-738319 | CMP | Speedfam | BEARING,BALL 3/8 DIA TORLON | New OEM | Contact Us |
| 0740-739678 | CMP | Speedfam | BEARING,BALL 1"X2"X5"SEALED BOTH SD | New OEM | Contact Us |
| 0740-739881 | CMP | Speedfam | BEARING,BALL 20MMX37MMX9MMSST 2SEAL | New OEM | Contact Us |
| 0750-103649 | CMP | Speedfam | TABLE,ROTARY COMPACT AIR SAPC | New OEM | Contact Us |
| 0750-105095 | CMP | Speedfam | REGULATOR,PRESSURE 0-75PSI SI | New OEM | Contact Us |
| 0750-105103 | CMP | Speedfam | REGULATOR, PRESSURE 0-75PSI RPC2 | New OEM | Contact Us |
| 0750-106983 | CMP | Speedfam | SMC Pneumatic Rodless Cylinder | New OEM | Contact Us |
| 0750-111042 | CMP | Speedfam | CYLINDER,25MM BORE PAD CONDITIONER | New OEM | Contact Us |
| 0750-111515 | CMP | Speedfam | CYLINDER,AIR 8BORE 6STRK NON-ROTA | New OEM | Contact Us |
| 0750-700175 | CMP | Speedfam | CYLINDER,AIR 20MMBS X 5MMSTROKE | New OEM | Contact Us |
| 0750-700176 | CMP | Speedfam | CYLINDER,AIR 8" BORE 6" STROKE | New OEM | Contact Us |
| 0750-700177 | CMP | Speedfam | CYLINDER, LIFT | New OEM | Contact Us |
| 0750-700180 | CMP | Speedfam | CYLINDER,RODLESS | New OEM | Contact Us |
| 0750-718407 | CMP | Speedfam | CYLINDER,BOOT HOIST 1 X 1-3/8 X 5 | New OEM | Contact Us |
| 0750-738006 | CMP | Speedfam | CYLINDER,RODLESS 6.50 STROKE | New OEM | Contact Us |
| 0750-738085 | CMP | Speedfam | CYLINDER,140MM STROKE W/SNSR | New OEM | Contact Us |
| 0750-738086 | CMP | Speedfam | CYLINDER,220MM STROKE W/SNSR | New OEM | Contact Us |
| 0750-738279 | CMP | Speedfam | CYLINDER,COMPACT DBL ACTING BUF MOD | New OEM | Contact Us |
| 0750-738502 | CMP | Speedfam | REGULATOR, AIR PRESURE W/PRES G | New OEM | Contact Us |
| 0750-738527 | CMP | Speedfam | CYLINDER, AIR COMP 1 1/16"DIAX3/8"ST | New OEM | Contact Us |
| 0750-738985 | CMP | Speedfam | CYLINDER,AIR 1"STROKE | New OEM | Contact Us |
| 0760-100621 | CMP | Speedfam | HOUSING,LOCATOR ROTATION CHUCK SRD | New OEM | Contact Us |
| 0760-738590 | CMP | Speedfam | HOUSING, BRNG BRKT UPPR ARM BALL SPLN | New OEM | Contact Us |
| 0760-739686 | CMP | Speedfam | HOUSING,SHAFT PAD COND SPECIAL | New OEM | Contact Us |
| 0760-739777 | CMP | Speedfam | CASING,FILTER MODIFIED | New OEM | Contact Us |
| 0760-770156 | CMP | Speedfam | HOUSING,DWO MTR CONDITIONING LONG | New OEM | Contact Us |
| 0760-770958 | CMP | Speedfam | SPACER,LOWER DRIVE 776 | New OEM | Contact Us |
| 0770-100801 | CMP | Speedfam | SHAFT,SPIN DRY SST | New OEM | Contact Us |
| 0770-110198 | CMP | Speedfam | SPINDLE,DRIVE SST BUFF | New OEM | Contact Us |
| 0770-110206 | CMP | Speedfam | SHAFT,MOTOR APM | New OEM | Contact Us |
| 0770-700183 | CMP | Speedfam | DRIVE,LINE POLISH HEAD | New OEM | Contact Us |
| 0770-700887 | CMP | Speedfam | CLIP,ANTI ROTATION | New OEM | Contact Us |
| 0770-717054 | CMP | Speedfam | SHAFT,DRIVE WAFER HEAD | New OEM | Contact Us |
| 0770-717055 | CMP | Speedfam | COLLAR,DRIVE WAFER HEAD | New OEM | Contact Us |
| 0770-717056 | CMP | Speedfam | COLLAR,SNSR WAFER HEAD | New OEM | Contact Us |
| 0770-718387 | CMP | Speedfam | SHAFT, EXTENSION ARM MOUNT | New OEM | Contact Us |
| 0770-727425 | CMP | Speedfam | CLIP,ANTI ROTATION FORK | New OEM | Contact Us |
| 0770-730006 | CMP | Speedfam | SHAFT,PIVOT NOSE BLOCK PAD COND | New OEM | Contact Us |