Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
? Novellus: Concept One (C1D, C1W)
? Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
? Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 0300-700138 | CMP | Speedfam | CONN,M 5/32 X 10/32 | New OEM | Contact Us |
| 0300-700140 | CMP | Speedfam | CONN,MALE 1/2MNPT 1/2TUBE SPDF | New OEM | Contact Us |
| 0300-700145 | CMP | Speedfam | FTG,CONN 3/8OD X 1/4MNPT ACETAL | New OEM | Contact Us |
| 0300-700154 | CMP | Speedfam | CONN,SNSR FEM ST | New OEM | Contact Us |
| 0300-700157 | CMP | Speedfam | CONN,SNSR MALE ST | New OEM | Contact Us |
| 0300-700161 | CMP | Speedfam | CONN,UNION 3/8 TO 1/4 | New OEM | Contact Us |
| 0300-700234 | CMP | Speedfam | FERRULE,ORANGE | New OEM | Contact Us |
| 0300-700283 | CMP | Speedfam | GRIP,CORD .187-.312 1/2" KNOCKOUT | New OEM | Contact Us |
| 0300-700342 | CMP | Speedfam | LOOM,POLY 1/4 | New OEM | Contact Us |
| 0300-700343 | CMP | Speedfam | LOOM,POLY 1/2 | New OEM | Contact Us |
| 0300-700344 | CMP | Speedfam | LOOM,POLY 3/8 | New OEM | Contact Us |
| 0300-700605 | CMP | Speedfam | HEAT SHRINK,SLEEVE ID 10-16 AWG | New OEM | Contact Us |
| 0300-700617 | CMP | Speedfam | SPLITTER,VGA | New OEM | Contact Us |
| 0300-700689 | CMP | Speedfam | MOUNT,CABLE TIE #10 | New OEM | Contact Us |
| 0300-700978 | CMP | Speedfam | HEAT SHRINK,16-10AWG SLEEVE ID | New OEM | Contact Us |
| 0300-717532 | CMP | Speedfam | MOUNT,PANDUIT CABLE TIE | New OEM | Contact Us |
| 0300-717933 | CMP | Speedfam | TERMINAL,RING YELLOW #10-8 | New OEM | Contact Us |
| 0300-717984 | CMP | Speedfam | LOOM, POLY 3/4" | New OEM | Contact Us |
| 0300-718768 | CMP | Speedfam | TAPE,UHMV DOT .010"THK 3/8"DIA | New OEM | Contact Us |
| 0300-737848 | CMP | Speedfam | CONN,RECTANGULAR MULTI 5/32 OD | New OEM | Contact Us |
| 0300-738524 | CMP | Speedfam | CORDSET, 2M W/QUICK CONNECT | New OEM | Contact Us |
| 0300-770125 | CMP | Speedfam | RECPT,776 QUICK CHANGE 4P MALE | New OEM | Contact Us |
| 0300-770335 | CMP | Speedfam | GRIP,CORD 1" .800-1.065 | New OEM | Contact Us |
| 0300-770406 | CMP | Speedfam | TERMINAL,776 EQUIPE TEACH | New OEM | Contact Us |
| 03-180277-00 | CMP | Speedfam | CBL ASSY,SNSR,CARRIER,300MM | New OEM | Contact Us |
| 03-182087-00 | CMP | Speedfam | CBL ASSY,4 PORT COM,SYSCON-VERITY,MV200 | New OEM | Contact Us |
| 0325-737465 | CMP | Speedfam | CABLE,ENCODER 10FT SERVOPACK | New OEM | Contact Us |
| 0325-738361 | CMP | Speedfam | CABLE,PS2 6 MALE TO AT 5 FEM | New OEM | Contact Us |
| 0325-740443 | CMP | Speedfam | CABLE,REV 3.3 I/O TO FURON R1-R2 | New OEM | Contact Us |
| 0325-740447 | CMP | Speedfam | CABLE,SMIF TO R3 SIGNAL | New OEM | Contact Us |
| 0325-740643 | CMP | Speedfam | CABLE, 110FT CAT5 NETWORK 776 | New OEM | Contact Us |
| 03-287956-00 | CMP | Speedfam | CBL ASSY,WHS,MV200,3,ROBOT COMM | New OEM | Contact Us |
| 03-308990-00 | CMP | Speedfam | CBL ASSY,PNEU PNL,REG I/O | New OEM | Contact Us |
| 03-352607-00 | CMP | Speedfam | CBL ASSY,472 AEON MONITOR POWER | New OEM | Contact Us |
| 03-383351-00 | CMP | Speedfam | CBL ASSY,KEY SWITCH R1 | New OEM | Contact Us |
| 03-391754-00 | CMP | Speedfam | CBL ASSY,PL40 TO SENSOR | New OEM | Contact Us |
| 03-395586-00 | CMP | Speedfam | CBL ASSY,EXTENSION 12V R1 | New OEM | Contact Us |
| 03-395592-00 | CMP | Speedfam | CBL ASSY,R1 INTERLOCK GENMARK | New OEM | Contact Us |
| 03-412202-00 | CMP | Speedfam | CBL ASSY,JUMPER R1 INTERLOCK | New OEM | Contact Us |
| 03-414790-00 | CMP | Speedfam | CBL ASSY,MODE SWITCH | New OEM | Contact Us |
| 03-451859-00 | CMP | Speedfam | CBL ASSY,MONITOR POWER MV200 | New OEM | Contact Us |
| 0350-102609 | CMP | Speedfam | SHIELD,FRONT SWING UP | New OEM | Contact Us |
| 0350-103807 | CMP | Speedfam | SHIELD,472 FRONT SWING UP HOOD | New OEM | Contact Us |
| 0350-700318 | CMP | Speedfam | BOX,JUNCTION SNSR | New OEM | Contact Us |
| 0350-718615 | CMP | Speedfam | FAN,115V ROOFMOUNT PAGODA | New OEM | Contact Us |
| 0350-737762 | CMP | Speedfam | GUIDE,MINIATURE W/430 RAIL | New OEM | Contact Us |
| 0375-111075 | CMP | Speedfam | SCANNER,LASER CLASS 1 | New OEM | Contact Us |
| 04-177310-00 | CMP | Speedfam | KIT,ONSERT INSTALL,O-RING | New OEM | Contact Us |
| 04-179313-00 | CMP | Speedfam | KIT,SHIP1,ONSERT,200MM,SLD,T1 | New OEM | Contact Us |
| 04-179842-00 | CMP | Speedfam | KIT,O-RING,ONSERT,300MM | New OEM | Contact Us |
| 04-181864-00 | CMP | Speedfam | KIT,0200-700163 CNTOR REPLACEMENT | New OEM | Contact Us |
| 04-188603-00 | CMP | Speedfam | KIT,UPPER HEAD RESTRAINT,MV200 | New OEM | Contact Us |
| 04-326495-00 | CMP | Speedfam | KIT,SCRW,SKT,HEX,6-32 X .75IN,SST,INT SE | New OEM | Contact Us |
| 04-327327-00 | CMP | Speedfam | KIT,REBUILD,SEALS & BEARING,ROTARY UNION | New OEM | Contact Us |
| 04-328006-00 | CMP | Speedfam | KIT,EDGE GAP,NON-CONTACT,676/776 | New OEM | Contact Us |
| 04-328008-00 | CMP | Speedfam | KIT,EDGE GAP,NON-CONTACT,MV200 | New OEM | Contact Us |
| 04-328009-00 | CMP | Speedfam | KIT,EDGE GAP,NON-CONTACT,676/776/MV200 | New OEM | Contact Us |
| 04-343099-00 | CMP | Speedfam | KIT,SENSOR,BUFF,PRESSURE 0-100PSI 0-5VOL | New OEM | Contact Us |
| 04-343709-00 | CMP | Speedfam | KIT,ONSERT INSTALL,O-RING,AEON | New OEM | Contact Us |
| 04-351063-00 | CMP | Speedfam | KIT,INTEGRATION SFTW CNTRLS 472 AEON | New OEM | Contact Us |
| 04-354359-00 | CMP | Speedfam | KIT,PIK,CLAMP,CAP,DRIVELINE COUPLING | New OEM | Contact Us |
| 04-361326-00 | CMP | Speedfam | KIT,1/2HP,S11 DRIVE UPGD | New OEM | Contact Us |
| 04-361558-00 | CMP | Speedfam | KIT,472 AEON APP1000 | New OEM | Contact Us |
| 04-361601-00 | CMP | Speedfam | KIT,2HP,S11 DRIVE UPGD | New OEM | Contact Us |
| 04-365069-00 | CMP | Speedfam | KIT,REMOVAL,ORBIT MTR,676,776,MV200 | New OEM | Contact Us |
| 04-366835-00 | CMP | Speedfam | KIT,472 AEON STD WATER TRK SNSRS | New OEM | Contact Us |
| 04-367341-00 | CMP | Speedfam | PM KIT,MV200,MOMENTUM HEAD REBUILD | New OEM | Contact Us |
| 04-367356-00 | CMP | Speedfam | PM KIT,R2,776 POLISHER | New OEM | Contact Us |
| 04-367357-00 | CMP | Speedfam | PM KIT, R1, 776 POLISHER | New OEM | Contact Us |
| 04-371039-00 | CMP | Speedfam | KIT, CYLINDER, SWITCH, MV200 | New OEM | Contact Us |
| 04-381242-00 | CMP | Speedfam | KIT,REBUILD,ROTARY UNION,964589 | New OEM | Contact Us |
| 04-382310-00 | CMP | Speedfam | KIT,ENDPOINT,VERITY SYSTEM,ROHS | New OEM | Contact Us |
| 04-383347-00 | CMP | Speedfam | KIT,PNEUMATICS ROBOT R1 | New OEM | Contact Us |
| 04-383348-00 | CMP | Speedfam | KIT,ELECTRICAL ROBOT R1 | New OEM | Contact Us |
| 04-383550-00 | CMP | Speedfam | KIT,SENTINEL,ETHERNET READY,MV200 | New OEM | Contact Us |
| 04-383552-00 | CMP | Speedfam | KIT,CONVERSION,ROHS SPECTROGRAPH,MV200 | New OEM | Contact Us |
| 04-383553-00 | CMP | Speedfam | KIT,CONV,ROHS FLASHLAMP,SPECTROGRAPH,MV | New OEM | Contact Us |
| 04-391755-00 | CMP | Speedfam | KIT,CYLINDER,UPPER BRUSH | New OEM | Contact Us |
| 04-398415-00 | CMP | Speedfam | KIT,RELAY,1P,208V,125A,SSR,W/ COVER | New OEM | Contact Us |
| 04-414154-00 | CMP | Speedfam | KIT,CES COMPUTERS DUAL CORE MV200 | New OEM | Contact Us |
| 04-421294-00 | CMP | Speedfam | KIT,POWER SUPPLY,AURIGA VISION POLISHER | New OEM | Contact Us |
| 04-422768-00 | CMP | Speedfam | KIT,POWER SUPPLY,MV200 | New OEM | Contact Us |
| 04-439001-00 | CMP | Speedfam | KIT,ARM GUARD RELAY,372M | New OEM | Contact Us |
| 04-444044-00 | CMP | Speedfam | KIT,UPPER BRUSH MOTOR MV200 | New OEM | Contact Us |
| 04-446178-00 | CMP | Speedfam | KIT,ADAPTER,CYLINDER,AIR 1.5BORE .5 STRK | New OEM | Contact Us |
| 04-451858-00 | CMP | Speedfam | KIT,MONITOR REPLACEMENT MV200 | New OEM | Contact Us |
| 04-456482-00 | CMP | Speedfam | KIT,SHIP,TEMPLATE,V3,52M | New OEM | Contact Us |
| 04-460619-00 | CMP | Speedfam | KIT,FTG,MOD SCRW,SLURRY DIAPHRAGM PM,776 | New OEM | Contact Us |
| 04-708357-01 | CMP | Speedfam | SHAFT ASSY, WFR LIFT | New OEM | Contact Us |
| 04-709551-01 | CMP | Speedfam | VALVE, SOL, 24VDC, 3-PORT, 2-POS | New OEM | Contact Us |
| 04-712161-01 | CMP | Speedfam | SHIELD, BELLY, CMAG II | New OEM | Contact Us |
| 04-712186-01 | CMP | Speedfam | COLLAR,P/P RAM PAD | New OEM | Contact Us |
| 05-178093-00 | CMP | Speedfam | RETROFIT KIT,60V PWR SUPPLY,472 | New OEM | Contact Us |
| 05-290813-00 | CMP | Speedfam | RETROKIT,CLARUS CLEANER,ROTATION DETECTIon | New OEM | Contact Us |
| 05-384601-00 | CMP | Speedfam | RETROKIT,200MM,PC COMP. REPLACEMENT | New OEM | Contact Us |
| 0700-102280 | CMP | Speedfam | SEAL,EPDM.765ID 1"OD .125THK | New OEM | Contact Us |
| 0700-108450 | CMP | Speedfam | SEAL,SINGLE LIP 7/8OD SHAFT #8624 | New OEM | Contact Us |
| 0700-109584 | CMP | Speedfam | O-RING,VITON 3.37ID .12THK 75DUR | New OEM | Contact Us |
| 0700-109585 | CMP | Speedfam | O-RING,VITON 11.0ID .12THK 75DUR | New OEM | Contact Us |
| 0700-111198 | CMP | Speedfam | SEAL,FACE ETHYLENE-PROPYLENE | New OEM | Contact Us |