Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
? Novellus: Concept One (C1D, C1W)
? Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
? Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 0125-770404/RW | CMP | Speedfam | CNTRLR,776 EQUIPE R3 TILT & SMIF CAS | New OEM | Contact Us |
| 0125-770594 | CMP | Speedfam | MOUSE,CIRCUIT BOARD & OVERLAY | New OEM | Contact Us |
| 0125-770727 | CMP | Speedfam | CONVERTER,RS-232/422 | New OEM | Contact Us |
| 0125-770729 | CMP | Speedfam | RELAY,24VDC RELECO | New OEM | Contact Us |
| 0125-771422 | CMP | Speedfam | TOUCH STYLUS,SUPPLIED WITH FPD | New OEM | Contact Us |
| 0125-771537 | CMP | Speedfam | CARD,NETWORK INTERFACE | New OEM | Contact Us |
| 0125-772074/RW | CMP | Speedfam | CARD, 4PORT RS422/485 SERIAL INTRFCE | New OEM | Contact Us |
| 0125-772200 | CMP | Speedfam | MODULE,INPUT 2 CHANNEL AIMA | New OEM | Contact Us |
| 0150-109297 | CMP | Speedfam | MTR,POLISH HEAD LOWER LEFT | New OEM | Contact Us |
| 0150-109298 | CMP | Speedfam | MTR,POLISH HEAD LOWER RIGHT | New OEM | Contact Us |
| 0150-109900 | CMP | Speedfam | MTR,PAD OSCILLATOR K32V | New OEM | Contact Us |
| 0150-110931 | CMP | Speedfam | MTR, WAFER HEAD UPPER LEFT | New OEM | Contact Us |
| 0150-110932 | CMP | Speedfam | MTR, WAFER HEAD UPPER RIGHT | New OEM | Contact Us |
| 0150-110983 | CMP | Speedfam | MTR,DRIVE W/HUB 776 R1/R2 SM HOUSING | New OEM | Contact Us |
| 0150-111665 | CMP | Speedfam | MTR,5PHASE STEPPER 60MM 10:1 | New OEM | Contact Us |
| 0150-111675 | CMP | Speedfam | Driver, Stepper 5PH 24VDC | New OEM | Contact Us |
| 0150-111717 | CMP | Speedfam | PWR SUPPLY,5VDC 4AMP | New OEM | Contact Us |
| 0150-112660 | CMP | Speedfam | DRIVER,SERVO 20-60VOLTS 6AMP | New OEM | Contact Us |
| 0150-700182 | CMP | Speedfam | DRIVE,SLURRY MTR | New OEM | Contact Us |
| 0150-700184 | CMP | Speedfam | DRIVER,STEP MTR PAD CONDITIONER | New OEM | Contact Us |
| 0150-700280 | CMP | Speedfam | GENERATOR,VACUUM | New OEM | Contact Us |
| 0150-701438 | CMP | Speedfam | MTR,PAD CONDITIONER STEPPER | New OEM | Contact Us |
| 0150-719095 | CMP | Speedfam | MTR,SLURRY DRIVE | New OEM | Contact Us |
| 0150-727165 | CMP | Speedfam | MTR,MOD PUMP | New OEM | Contact Us |
| 0150-737467 | CMP | Speedfam | MTR,AC SERVO UL SGM02U3B4L | New OEM | Contact Us |
| 0150-737612 | CMP | Speedfam | DRIVER,SERVO BRUSHLESS B30A8 | New OEM | Contact Us |
| 0150-738040 | CMP | Speedfam | DRIVER,5PHASE 24VDC INPUT | New OEM | Contact Us |
| 0150-738137 | CMP | Speedfam | DRIVER,OSCILLATOR 6415 | New OEM | Contact Us |
| 0150-739383 | CMP | Speedfam | DRIVE,SERVO 200VAC SPEED/TORQUE CE | New OEM | Contact Us |
| 0150-770143 | CMP | Speedfam | MTR,EURO LOWER MP2 & 4 | New OEM | Contact Us |
| 0150-770144 | CMP | Speedfam | MTR,EURO LOWER MP1 & 3 | New OEM | Contact Us |
| 0150-770147 | CMP | Speedfam | MTR,EURO UPPER MP1 & 3 | New OEM | Contact Us |
| 0150-770148 | CMP | Speedfam | MTR,EURO UPPER MP2 & 4 | New OEM | Contact Us |
| 0150-770249 | CMP | Speedfam | GENERATOR,776 AV SERIES | New OEM | Contact Us |
| 0150-770255 | CMP | Speedfam | PWR SUPPLY,776 24V/7.2A/ECASE | New OEM | Contact Us |
| 0175-700066 | CMP | Speedfam | CB, 3AMP | New OEM | Contact Us |
| 0175-737585 | CMP | Speedfam | CB,16AMP 3PHASE CE | New OEM | Contact Us |
| 0200-770258 | CMP | Speedfam | CNTOR,208V 100A 24V COIL | New OEM | Contact Us |
| 02-115274-00 | CMP | Speedfam | ASSY,SLITVALVE,46MM,PM | New OEM | Contact Us |
| 02-176524-00 | CMP | Speedfam | ASSY,SOLID PLATEN PDM,LP CAPABLE | New OEM | Contact Us |
| 02-177392-00 | CMP | Speedfam | ASSY,SOLID PLTN 29 PDM,LAPED,LP CAPABLE | New OEM | Contact Us |
| 02-181494-00 | CMP | Speedfam | ASSY,END EFFECTOR,R2 | New OEM | Contact Us |
| 02-185205-00 | CMP | Speedfam | ASSY,SPRAY RING EXTENDED,MP1&MP3 | New OEM | Contact Us |
| 02-185210-00 | CMP | Speedfam | ASSY,EXTENDED SPRAY RING,MP2&MP4 | New OEM | Contact Us |
| 0225-700656 | CMP | Speedfam | TERMINAL BLOCK,5MM 3POSN ANGLED BLUE DIN | New OEM | Contact Us |
| 0225-771372 | CMP | Speedfam | RELAY,24VDC 4 POLE | New OEM | Contact Us |
| 02-283678-00 | CMP | Speedfam | ASSY,BRUSH PAD COND XDF STIFF | New OEM | Contact Us |
| 02-293065-00 | CMP | Speedfam | ASSY,DISPLAY,EDGE GAP MEASUREMENT | New OEM | Contact Us |
| 02-302756-00 | CMP | Speedfam | ASSY,ONSERT W/TEFLON | New OEM | Contact Us |
| 02-311919-00 | CMP | Speedfam | ASSY,PARTICLE CATCH TRAY,MV | New OEM | Contact Us |
| 02-316713-00 | CMP | Speedfam | ASSY,LOCKING V-BAND CLAMP | New OEM | Contact Us |
| 02-352472-00 | CMP | Speedfam | ASSY,PAD BACKER,16 HOLES | New OEM | Contact Us |
| 02-381217-00 | CMP | Speedfam | ASSY,SOLID PLATEN,29 HOLE,LP,SST INSERT | New OEM | Contact Us |
| 02-460636-00 | CMP | Speedfam | ASSY,PAD BACKING RIVETED,ADHESIVE MOD | New OEM | Contact Us |
| 02-460637-00 | CMP | Speedfam | ASSY,PAD BKR RIVET,16HOLE,CTR PLUG,ADHES | New OEM | Contact Us |
| 02-460845-00 | CMP | Speedfam | ASSY,PAD BKR,RIVETED,15 HOLES,ADHESIVE M | New OEM | Contact Us |
| 02-460847-00 | CMP | Speedfam | ASSY,PAD BACKER,16 HOLES,ADHESIVE MOD | New OEM | Contact Us |
| 02-460848-00 | CMP | Speedfam | ASSY,PAD BACKER,RIVETED,FLAT,ADHESIVE MOD | New OEM | Contact Us |
| 02-462284-00 | CMP | Speedfam | ASSY,PAD BACKER,RIVETED,25 HOLES,ADHESIV | New OEM | Contact Us |
| 02-462400-00 | CMP | Speedfam | ASSY,PAD BACKER,RIVET,16 HOLE,CTR PLUG,SLOTTED,ADHESIVE MOD | New OEM | Contact Us |
| 02-463068-00 | CMP | Speedfam | ASSY,R1 WAND,TRAY WITH SLEEVES,MV200 | New OEM | Contact Us |
| 0250-103606 | CMP | Speedfam | KEYPAD INTERFACE,CURVED CTR | New OEM | Contact Us |
| 0250-110190 | CMP | Speedfam | SWITCH,CASSETTE PRESENT TILTERS | New OEM | Contact Us |
| 0250-111774 | CMP | Speedfam | SWITCH,EMERGENCY OFF | New OEM | Contact Us |
| 0250-700639 | CMP | Speedfam | SWITCH,PROXIMITY | New OEM | Contact Us |
| 0250-700640 | CMP | Speedfam | SWITCH, PROXIMITY | New OEM | Contact Us |
| 0250-700641 | CMP | Speedfam | SWITCH,SMC VACUUM | New OEM | Contact Us |
| 0250-717242 | CMP | Speedfam | BUTTON,ILLUM PUSH | New OEM | Contact Us |
| 0250-718799 | CMP | Speedfam | SWITCH,MICRO CE CERTIFIED | New OEM | Contact Us |
| 0250-737505 | CMP | Speedfam | SWITCH,PRESSURE DIGITAL 0-142 PSI | New OEM | Contact Us |
| 0250-737599 | CMP | Speedfam | SWITCH,DISCONNECT 3POLE ROTARY 20A | New OEM | Contact Us |
| 0250-738366 | CMP | Speedfam | SWITCH,SERVSWITCH 8CH VGA/KEY/MOUSE | New OEM | Contact Us |
| 0250-770284 | CMP | Speedfam | CONTACT,BLOC LMP INCNDSCNT 24VAC/DC | New OEM | Contact Us |
| 0250-770286 | CMP | Speedfam | CONTACT,BLOCK SGL W/SCRW TERM 1N/O | New OEM | Contact Us |
| 0250-770288 | CMP | Speedfam | CONTACT,BLOCK SGL W/SCRW TERM 1NC | New OEM | Contact Us |
| 0250-770290 | CMP | Speedfam | OPERATOR,PUSH SQ ILLUM WHT FLUSH DIFFUSE | New OEM | Contact Us |
| 0250-770291 | CMP | Speedfam | OPERATOR,PUSH BTN RECESSED SQ BLUE | New OEM | Contact Us |
| 0250-772816 | CMP | Speedfam | SWITCH,LOCAL/REMOTE ELECTRONIC | New OEM | Contact Us |
| 02-5323-02 | CMP | Speedfam | SPRING,BALL PIVOT,6 IN CAP | New OEM | Contact Us |
| 0275-104048 | CMP | Speedfam | SNSR,FLUID LEVEL HEAT EXCHANGER | New OEM | Contact Us |
| 0275-107742 | CMP | Speedfam | SNSR,PROXIMITY AIR CYLINDER | New OEM | Contact Us |
| 0275-110003 | CMP | Speedfam | SNSR,PRESSURE 0-100PSI 0-5VOLT | New OEM | Contact Us |
| 0275-110985 | CMP | Speedfam | SNSR,PRESSURE 0-15PSIG 1-5V OUT | New OEM | Contact Us |
| 0275-111659 | CMP | Speedfam | SNSR,PROXIMITY M14 5-8MM SHIELDED | New OEM | Contact Us |
| 0275-111660 | CMP | Speedfam | SNSR, INDUCTIVE PROX 3MM NON-SHLD | New OEM | Contact Us |
| 0275-700597 | CMP | Speedfam | SNSR,CYLINDER | New OEM | Contact Us |
| 0275-701360 | CMP | Speedfam | SNSR,FIBER UNIT FU 6F | New OEM | Contact Us |
| 0275-727375 | CMP | Speedfam | WAND,4 PORT END EFFECTOR | New OEM | Contact Us |
| 0275-737838 | CMP | Speedfam | XDCR,0-10 PSIG 4-20MA | New OEM | Contact Us |
| 0275-738042 | CMP | Speedfam | SNSR,PROX SWITCH INDUCTIVE | New OEM | Contact Us |
| 0275-738138 | CMP | Speedfam | SNSR, NPN (SMC D-H7A1) | New OEM | Contact Us |
| 0275-738229 | CMP | Speedfam | LOAD CELL,COMPRESSION MINI | New OEM | Contact Us |
| 0275-738525 | CMP | Speedfam | SNSR, MAGNETIC AIR CYL NPN | New OEM | Contact Us |
| 0275-739165 | CMP | Speedfam | SNSR,GRIPPER | New OEM | Contact Us |
| 0275-739183 | CMP | Speedfam | SNSR, PROX 12MM DIA CAPT NONSHIELD | New OEM | Contact Us |
| 0275-739375 | CMP | Speedfam | SNSR,HALL NPN OMNI PIGTAIL 39 | New OEM | Contact Us |
| 0275-770236 | CMP | Speedfam | SNSR,KEYENCE FS-T2 | New OEM | Contact Us |
| 0300-110151 | CMP | Speedfam | CONTACT, DUAL N/O SCRW TERMINALS | New OEM | Contact Us |
| 03-00136-00 | CMP | Speedfam | CABLE ASSY,CA142,EMIT | New OEM | Contact Us |
| 0300-700124 | CMP | Speedfam | CONN,ALCON | New OEM | Contact Us |