Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
? Novellus: Concept One (C1D, C1W)
? Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
? Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 975610 | CMP | Speedfam | FINGER,TALL FLATTED WAFER WAND .060 | New OEM | Contact Us |
| 975630 | CMP | Speedfam | GUIDE,EDGE GRIP WAND TIGHT ANGLE | New OEM | Contact Us |
| 975700 | CMP | Speedfam | PIN,YOKE DRIVE LINE POLISH HEAD | New OEM | Contact Us |
| 975765 | CMP | Speedfam | ASSY,ROLLER TYPE A | New OEM | Contact Us |
| 975843 | CMP | Speedfam | MANIFOLD,VALVE 4PORT 1/2" | New OEM | Contact Us |
| 975979 | CMP | Speedfam | PROTECTOR,GAUGE 1/2T MALE X 1/2T FEM | New OEM | Contact Us |
| 976007 | CMP | Speedfam | SHIELD,EXTENDED SPRAY RING NOTCHED | New OEM | Contact Us |
| 976241 | CMP | Speedfam | PLATE,SPACER BRUSH XDF | New OEM | Contact Us |
| 976246 | CMP | Speedfam | CLIP,SENSOR RIGHT HAND | New OEM | Contact Us |
| 976247 | CMP | Speedfam | CLIP,SENSOR LEFT HAND | New OEM | Contact Us |
| 976267 | CMP | Speedfam | ASSY,BRUSH PAD CONDITIONER XDF | New OEM | Contact Us |
| 976499 | CMP | Speedfam | BEARING,DDL-149022 | New OEM | Contact Us |
| 976706 | CMP | Speedfam | CNTRLR,I/O B3000-B | New OEM | Contact Us |
| 976744 | CMP | Speedfam | RFK,REPLACE OBSOLETE LD/UNLD SWITCH | New OEM | Contact Us |
| 976796 | CMP | Speedfam | CONTROLLER,MAIN SAFETY LIGHT CURTAIN | New OEM | Contact Us |
| 976854 | CMP | Speedfam | SHAFT,ADAPTER APM | New OEM | Contact Us |
| 976855 | CMP | Speedfam | KEY,3/16SQ +.000/-.002 .5L 316SST | New OEM | Contact Us |
| 976858 | CMP | Speedfam | SHAFT,DRIVE ENDPOINT & APM | New OEM | Contact Us |
| 976918 | CMP | Speedfam | CNTRLR,INDEX/DR 7.9A 115V V2.060 | New OEM | Contact Us |
| 977055 | CMP | Speedfam | CNTRLR,FLOW 0-125ML/MIN W/12' CABLE | New OEM | Contact Us |
| 977056 | CMP | Speedfam | CONTROLLER,FLOW 0-250ML/MIN W/12' CABLE | New OEM | Contact Us |
| 977059 | CMP | Speedfam | BELT,BRUSH UPPER ARM 7700 | New OEM | Contact Us |
| 977061 | CMP | Speedfam | BELT,BRUSH UPPER DRIVE 7700 | New OEM | Contact Us |
| 977062 | CMP | Speedfam | BELT,BRUSH LOWER DRIVE 7700 | New OEM | Contact Us |
| 977081 | CMP | Speedfam | ASSY,TENSIONER UPPER ARM 7700 | New OEM | Contact Us |
| 977406 | CMP | Speedfam | RETAINER,SENSOR EDGE GRIP WAND | New OEM | Contact Us |
| 977596 | CMP | Speedfam | CABLE,24AWG 4PAIR 25' CAT5 | New OEM | Contact Us |
| 977672 | CMP | Speedfam | ASSY,POLISH HEAD SOLID PLATEN | New OEM | Contact Us |
| 977922 | CMP | Speedfam | WELDMENT,CLAMP V-BAND REINF LATCH 316SST | New OEM | Contact Us |
| 977963 | CMP | Speedfam | FIXTURE,SENSOR HEIGHT SEALED | New OEM | Contact Us |
| 978101 | CMP | Speedfam | MANIFOLD,CHEM DISTRIBUTION TEFLON | New OEM | Contact Us |
| 978366 | CMP | Speedfam | WELDMENT,COVER TOP XDF MV | New OEM | Contact Us |
| 978367 | CMP | Speedfam | BASE,COVER TOP XDF MV | New OEM | Contact Us |
| 978368 | CMP | Speedfam | ASSY, SHIELD ARM XDF MV | New OEM | Contact Us |
| 978371 | CMP | Speedfam | SEAL,SHIELD ARM XDF MV | New OEM | Contact Us |
| 978417 | CMP | Speedfam | DIAPHRAGM,SLURRY .074THK EPDM | New OEM | Contact Us |
| 978581 | CMP | Speedfam | SPACER,EGEE GRIP SNSR 200MM | New OEM | Contact Us |
| 978588 | CMP | Speedfam | ASSY,EGEE OPTIONAL SENSORS 200MM | New OEM | Contact Us |
| 978605 | CMP | Speedfam | C/A,EGEE SENSOR OPTION1 200MM | New OEM | Contact Us |
| 978647 | CMP | Speedfam | CARD,4PORT RS-232 INTERFACE | New OEM | Contact Us |
| 978687 | CMP | Speedfam | MANF,SLURRY 29HOLE PDM | New OEM | Contact Us |
| 978697 | CMP | Speedfam | POST, FRAME OUTSIDE CHASE SIDE R 200MM | New OEM | Contact Us |
| 978703 | CMP | Speedfam | CBL ASSY,LONGVIEW 200MM | New OEM | Contact Us |
| 978706 | CMP | Speedfam | C/A,SYSCON 200MM | New OEM | Contact Us |
| 978721 | CMP | Speedfam | BRKT,2-CH SPLITTER 200MM | New OEM | Contact Us |
| 978722 | CMP | Speedfam | BRKT,LONGVIEW 200MM | New OEM | Contact Us |
| 978742 | CMP | Speedfam | ASSY,EGEE W/SENSORS 200MM | New OEM | Contact Us |
| 978754 | CMP | Speedfam | DIAPHRAGM,WEAR RING RWR | New OEM | Contact Us |
| 978756 | CMP | Speedfam | RING,CLAMP LOWER #1 W/TEFLON 3.1A | New OEM | Contact Us |
| 978852 | CMP | Speedfam | 16.00SCREW,SET 4-40 X .75 MOD | New OEM | Contact Us |
| 978871 | CMP | Speedfam | ASSY,SHAFT WAFER SENSOR EGEE 200MM | New OEM | Contact Us |
| 978894 | CMP | Speedfam | SLEEVE,PISTON EGEE 316SST 200MM | New OEM | Contact Us |
| 978895 | CMP | Speedfam | PIN, GUIDE EGEE 316SST 200MM | New OEM | Contact Us |
| 978896 | CMP | Speedfam | PIN,MOUNT EGEE 316SST 200MM | New OEM | Contact Us |
| 979116 | CMP | Speedfam | VALVE, SELENOID 3WAY NC 24VDC | New OEM | Contact Us |
| 979227 | CMP | Speedfam | SHELF LOWER | New OEM | Contact Us |
| 979228 | CMP | Speedfam | SHELF UPPER | New OEM | Contact Us |
| 979382 | CMP | Speedfam | CABLE,SPECTROMETER TRIGGER CONTROL 9PIN | New OEM | Contact Us |
| 979638 | CMP | Speedfam | MTR,STEPPER 500 LINE ENCODER | New OEM | Contact Us |
| 979750 | CMP | Speedfam | MANIFOLD,SPINDLE SST BUFF | New OEM | Contact Us |
| 979987 | CMP | Speedfam | COLLAR,THRU BRUSH 200MM | New OEM | Contact Us |
| 00-672057-00 | CMP | Speedfam | PACK,20 WAFER CLIPS | New OEM | Contact Us |
| 0100-101663 | CMP | Speedfam | AMPL,BRUSH SERVO | New OEM | Contact Us |
| 0100-700045 | CMP | Speedfam | BRICK,DISCRETE | New OEM | Contact Us |
| 0100-700359 | CMP | Speedfam | MODULE,INPUT ANALOG 4-20MA | New OEM | Contact Us |
| 0100-700360 | CMP | Speedfam | MODULE,INPUT PLC KVC-16X | New OEM | Contact Us |
| 0100-700363 | CMP | Speedfam | MODULE,OUTPUT ANALOG 0-10V | New OEM | Contact Us |
| 0100-700364 | CMP | Speedfam | MODULE,PLC PWR DISTRIB | New OEM | Contact Us |
| 0100-717408 | CMP | Speedfam | BRICK,ANALOG | New OEM | Contact Us |
| 0100-737852 | CMP | Speedfam | MODULE,OUTPUT ANALOG 4-20MA MISTIC | New OEM | Contact Us |
| 01-0251-01 | CMP | Speedfam | ROLLER, HARD | New OEM | Contact Us |
| 0102-700999 | CMP | Speedfam | RELAY,OUTPUT BRD | New OEM | Contact Us |
| 0117-101701 | CMP | Speedfam | TRANSMITTER, PRESSURE PTX510-A088 0 | New OEM | Contact Us |
| 0125-106305 | CMP | Speedfam | MODULE,I/O DIGITAL INPUT 10-32V QUAD | New OEM | Contact Us |
| 0125-106306 | CMP | Speedfam | MODULE,OUTPUT QUAD SINK OPTO SNAP | New OEM | Contact Us |
| 0125-106307 | CMP | Speedfam | MODULE,OUTPUT QUAD SOURCE OPTO SNAP | New OEM | Contact Us |
| 0125-106308 | CMP | Speedfam | CARD,SERIAL PORT AC37 RS485 | New OEM | Contact Us |
| 0125-106432 | CMP | Speedfam | CNTRLR,MOTION 3-AXIS VER 2.0 | New OEM | Contact Us |
| 0125-107206/RW | CMP | Speedfam | PCB,CPU PNTM200MHZ MMX LCD(SEE BSC TXT) | New OEM | Contact Us |
| 0125-112096 | CMP | Speedfam | COMPUTER,676 MP/C2C MICROBX ICS PEN | New OEM | Contact Us |
| 0125-112097/RW | CMP | Speedfam | COMPUTER,676 ENDPT MICROBX ICS PENT | New OEM | Contact Us |
| 0125-112098/RW | CMP | Speedfam | COMPUTER,676 SYSCON ICS 2ND GENARAT | New OEM | Contact Us |
| 0125-112300 | CMP | Speedfam | MODULE,INPUT 776 R3 TRACK ASSY | New OEM | Contact Us |
| 0125-112301 | CMP | Speedfam | MODULE,OUTPUT 776 R3 TRACK ASSY | New OEM | Contact Us |
| 0125-112302 | CMP | Speedfam | RACK,I/O 24 POSITION R3 TRACK ASSY | New OEM | Contact Us |
| 0125-700330 | CMP | Speedfam | LIGHTPEN,VGA W/BUTTON | New OEM | Contact Us |
| 0125-700373 | CMP | Speedfam | MOV,24VDC | New OEM | Contact Us |
| 0125-700450 | CMP | Speedfam | CNTRLR,PROGRAMMABLE CPU | New OEM | Contact Us |
| 0125-701380 | CMP | Speedfam | MODULE,INPUT DIGITAL | New OEM | Contact Us |
| 0125-701381 | CMP | Speedfam | MODULE,OUTPUT DIGITAL | New OEM | Contact Us |
| 0125-718453 | CMP | Speedfam | TERMINATOR,RES SERIAL LINK OPTO 22 | New OEM | Contact Us |
| 0125-737469 | CMP | Speedfam | MODULE,OUTPUT 0-10V ISO OPTO SNAP | New OEM | Contact Us |
| 0125-737470 | CMP | Speedfam | MODULE,INPUT DUAL-10N TO 10V ISO OP | New OEM | Contact Us |
| 0125-737471 | CMP | Speedfam | MODULE,INPUT QUAD FAST OPTO SNAP | New OEM | Contact Us |
| 0125-737472 | CMP | Speedfam | MODULE,BACKPLANE SNAP B12M | New OEM | Contact Us |
| 0125-737870 | CMP | Speedfam | PCB,MULTIPLEXER ANALOG | New OEM | Contact Us |
| 0125-738145 | CMP | Speedfam | BACKPLANE,SNAP B16M | New OEM | Contact Us |
| 0125-738162 | CMP | Speedfam | MODULE,I/O ANALOG OUTPUT 0-10V DUAL | New OEM | Contact Us |
| 0125-739967 | CMP | Speedfam | MODULE,DEVICENET SERIAL INTRFC 16CH | New OEM | Contact Us |
| 0125-770399 | CMP | Speedfam | CNTRLR,776 R1 & R2 | New OEM | Contact Us |