Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
? Novellus: Concept One (C1D, C1W)
? Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
? Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 970066 | CMP | Speedfam | SUPPORT,UNIT BUM-10 | New OEM | Contact Us |
| 970068 | CMP | Speedfam | BEARING,RF-1980HH | New OEM | Contact Us |
| 970094 | CMP | Speedfam | MOUNT,CYLINDER FREE CDU20-25D-F9NL | New OEM | Contact Us |
| 970099 | CMP | Speedfam | HOLDER,PIN A | New OEM | Contact Us |
| 970106 | CMP | Speedfam | PIN,FASTENER | New OEM | Contact Us |
| 970111 | CMP | Speedfam | BEARING,SLIDE BUSH 16MMID ANTICORROSION | New OEM | Contact Us |
| 970116 | CMP | Speedfam | SLIDE,BUSH SMSK12UU | New OEM | Contact Us |
| 970131 | CMP | Speedfam | CYLINDER,COMPACT | New OEM | Contact Us |
| 970133 | CMP | Speedfam | ABSORBER,SHOCK RB1411 | New OEM | Contact Us |
| 970188 | CMP | Speedfam | BOX,SEPARATOR (BU1) | New OEM | Contact Us |
| 970189 | CMP | Speedfam | BOX,SEPARATOR (BU2) | New OEM | Contact Us |
| 970225 | CMP | Speedfam | COVER,1 | New OEM | Contact Us |
| 970226 | CMP | Speedfam | COVER,2 | New OEM | Contact Us |
| 970227 | CMP | Speedfam | COVER,3 | New OEM | Contact Us |
| 970228 | CMP | Speedfam | COVER,4 | New OEM | Contact Us |
| 970286 | CMP | Speedfam | ABSORBER,SHOCK | New OEM | Contact Us |
| 970318 | CMP | Speedfam | CYLINDER,COMPACT | New OEM | Contact Us |
| 970327 | CMP | Speedfam | BRKT,SNSR ANTI ROTATION | New OEM | Contact Us |
| 971948 | CMP | Speedfam | MOUNT,WAND R1 | New OEM | Contact Us |
| 971984 | CMP | Speedfam | TERMINAL,SOCKET 22-28AWG 250V FEM | New OEM | Contact Us |
| 972021 | CMP | Speedfam | SENSOR,INDUCTIVE PROX 8MM UNSHLD 3MM NPN | New OEM | Contact Us |
| 972178 | CMP | Speedfam | ROLLER,BAND 86D | New OEM | Contact Us |
| 972219 | CMP | Speedfam | SPLINE,BALL 10MM X 115MM LONG | New OEM | Contact Us |
| 972302 | CMP | Speedfam | SUPPORT SHELF LOWER | New OEM | Contact Us |
| 972324 | CMP | Speedfam | RING,CLAMP DIAPHRAGM MDL C11 WEAR RING | New OEM | Contact Us |
| 972380 | CMP | Speedfam | PLATE, MOUNTING C-11 WEAR RING MODULE | New OEM | Contact Us |
| 972409 | CMP | Speedfam | ROTARY,UNION 9PORT RS | New OEM | Contact Us |
| 972412 | CMP | Speedfam | ASSY,PAD COND 2 WAY CYLINDER XDF | New OEM | Contact Us |
| 972414 | CMP | Speedfam | PLATE,MOUNT TOP PIVOT 2WAY CYL XDF | New OEM | Contact Us |
| 972415 | CMP | Speedfam | PLATE,SUPPORT TOP PIVOT 2WAY CYL XDF | New OEM | Contact Us |
| 972416 | CMP | Speedfam | PLATE,MOUNT 2WAY CYL XDF | New OEM | Contact Us |
| 972417 | CMP | Speedfam | PIN,MOUNT 2WAY CYL XDF | New OEM | Contact Us |
| 972418 | CMP | Speedfam | BOLT,ROD 2WAY CYL XDF | New OEM | Contact Us |
| 972419 | CMP | Speedfam | PIN,ROD CLEVIS 2WAY CYL XDF | New OEM | Contact Us |
| 972467 | CMP | Speedfam | ASSY,TRANSDUCER +/-5PSID 4-20MA W/FTG | New OEM | Contact Us |
| 972712 | CMP | Speedfam | SHAFT,DRIVE WAFER HEAD MULTI PORT W/SEAL | New OEM | Contact Us |
| 972727 | CMP | Speedfam | BRUSH,MICROCLEAN PVA | New OEM | Contact Us |
| 972730 | CMP | Speedfam | O-RING,SQUARE CUT 2.02OD SHAFT 1.623OD | New OEM | Contact Us |
| 972837 | CMP | Speedfam | KIT,WEAR RING REPLACEMENT C-11 | New OEM | Contact Us |
| 972912 | CMP | Speedfam | REGULATOR,ELECTRO PNEU 24VDC 0-14PSI | New OEM | Contact Us |
| 973000 | CMP | Speedfam | GEARHEAD,RIGHT ANGLE 24MM 150:1 | New OEM | Contact Us |
| 973010 | CMP | Speedfam | COUPLING,20MM BORE 6KWY X 24MM BORE 8KWY | New OEM | Contact Us |
| 973011 | CMP | Speedfam | MOTOR,SERVO HIGH TORQUE W/RESOLVER PARKER | New OEM | Contact Us |
| 973012 | CMP | Speedfam | DRIVE,DIGITAL SERVO CONTINUOUS CUR 6AMP | New OEM | Contact Us |
| 973019 | CMP | Speedfam | REGULATOR, E/P A-T DISABLED HIGHER FLOW | New OEM | Contact Us |
| 973029 | CMP | Speedfam | CONTROLLER,I/O B3000 F/W 02/01 OR LATER | New OEM | Contact Us |
| 973141 | CMP | Speedfam | SHAFT,PAD COND XDF | New OEM | Contact Us |
| 973142 | CMP | Speedfam | HOUSING,PAD COND XDF | New OEM | Contact Us |
| 973143 | CMP | Speedfam | ASSY,PAD COND LOWER DRIVE XDF | New OEM | Contact Us |
| 973158 | CMP | Speedfam | KEY, SQUARE PARALLEL 6X6X35MM | New OEM | Contact Us |
| 973162 | CMP | Speedfam | PIK,COUPLING LWR DRIVE LINE POLISH HEAD | New OEM | Contact Us |
| 973194 | CMP | Speedfam | ASSY,JOINT PIVOT COND RIGID XDF | New OEM | Contact Us |
| 973195 | CMP | Speedfam | CLAMP,END SHAFT RH PAD COND RIGID XDF | New OEM | Contact Us |
| 973196 | CMP | Speedfam | ARM,PAD COND RIGID XDF | New OEM | Contact Us |
| 973198 | CMP | Speedfam | CAP,JOINT BEARING RIGID XDF | New OEM | Contact Us |
| 973199 | CMP | Speedfam | CLEVIS,JOINT PAD COND RIGID XDF | New OEM | Contact Us |
| 973200 | CMP | Speedfam | SHAFT,JOINT PAD COND RIGID XDF | New OEM | Contact Us |
| 973212 | CMP | Speedfam | SENSOR,6-24VDC NPN MAGNETORESISTIVE | New OEM | Contact Us |
| 973272 | CMP | Speedfam | SHAFT,COUPLER PAD COND XDF | New OEM | Contact Us |
| 973273 | CMP | Speedfam | BLOCK,PIVOT PAD COND XDF | New OEM | Contact Us |
| 973380 | CMP | Speedfam | BAR,SPRAY PAD COND XDF | New OEM | Contact Us |
| 973416 | CMP | Speedfam | COUPLING,TUBE SPRAY PAD COND XDF | New OEM | Contact Us |
| 973417 | CMP | Speedfam | ASSY,TUBE SPRAY PAD COND XDF | New OEM | Contact Us |
| 973427 | CMP | Speedfam | ASSY,2 STATION MANF ORBITAL | New OEM | Contact Us |
| 973429 | CMP | Speedfam | ASSY,3STATION MANF ORBITAL | New OEM | Contact Us |
| 973529 | CMP | Speedfam | RING,CLAMP LOWER SST#5 WFR MODL 316L SST | New OEM | Contact Us |
| 973835 | CMP | Speedfam | MTR,R4 UP/DN | New OEM | Contact Us |
| 973836 | CMP | Speedfam | BRAKE,R4 UP/DN | New OEM | Contact Us |
| 973837 | CMP | Speedfam | BOLT, CLAMP 2 | New OEM | Contact Us |
| 973853 | CMP | Speedfam | SPRING,REPLMNT EQPT ROBOT WRIST HOUSING | New OEM | Contact Us |
| 974061 | CMP | Speedfam | ADAPTER,UNION INR RTRY ELEC 830 TO 9PORT | New OEM | Contact Us |
| 974070 | CMP | Speedfam | KIT,ALIGNMENT TOOL PAD | New OEM | Contact Us |
| 974083 | CMP | Speedfam | FILTER,AIR LARGE BOWL | New OEM | Contact Us |
| 974084 | CMP | Speedfam | FILTER,AIR MEDIUM BOWL | New OEM | Contact Us |
| 974113 | CMP | Speedfam | PLATE,WAFER MODL 316L SST W/SNSR HOLE | New OEM | Contact Us |
| 974133 | CMP | Speedfam | GEARHEAD,RIGHT ANGLE 100:1RATIO 32MM | New OEM | Contact Us |
| 974324 | CMP | Speedfam | CONNECTOR,3CNDCT 30VAC 100MHZ | New OEM | Contact Us |
| 974325 | CMP | Speedfam | CABLE,3METER AMPL | New OEM | Contact Us |
| 974326 | CMP | Speedfam | ASSY,MECHANICAL PAD COND XDF | New OEM | Contact Us |
| 974360 | CMP | Speedfam | BEARING,6804ZZ(SUS) | New OEM | Contact Us |
| 974361 | CMP | Speedfam | BEARING,6807ZZ | New OEM | Contact Us |
| 974507 | CMP | Speedfam | CLAMP,END SHAFT LH PAD COND RIGID XDF | New OEM | Contact Us |
| 974512 | CMP | Speedfam | C/A, 15RACK2 SLOT2 I/O OUTPUT AB | New OEM | Contact Us |
| 974513 | CMP | Speedfam | C/A, 15RACK2 SLOT1 I/O INPUT AB | New OEM | Contact Us |
| 974514 | CMP | Speedfam | C/A, 15RACK2 SLOT1 I/O INPUT CD | New OEM | Contact Us |
| 974517 | CMP | Speedfam | C/A, I/O INTERCONNECT MIO | New OEM | Contact Us |
| 974582 | CMP | Speedfam | SCRW,SET 1/4-20X5/16 W/.040 316 SST | New OEM | Contact Us |
| 974583 | CMP | Speedfam | SCRW,SET CUP 1/4-20X5/16 W/.040 TEFLON | New OEM | Contact Us |
| 974607 | CMP | Speedfam | EXTENSION, TRIP-FLAT WFR SNSR ACTIVE WAND | New OEM | Contact Us |
| 974683 | CMP | Speedfam | ASSY,CABLE FEMALE ERU TO AMP | New OEM | Contact Us |
| 974689 | CMP | Speedfam | SNSR,CAPACITIVE 12M 8MM USHLD TEFLON | New OEM | Contact Us |
| 974884 | CMP | Speedfam | C/A,SENSOR ERU | New OEM | Contact Us |
| 974886 | CMP | Speedfam | ASSY,SNSR CAPT 12M 8MM USHLD TEFLON | New OEM | Contact Us |
| 974887 | CMP | Speedfam | BOOT,ELECTRICAL ROTARY UNION | New OEM | Contact Us |
| 974923 | CMP | Speedfam | FINGER,TALL ACTIVE WAND .060 | New OEM | Contact Us |
| 974967 | CMP | Speedfam | ASSY,MANIFOLD 3NOZZLE | New OEM | Contact Us |
| 975001 | CMP | Speedfam | NOZZLE,SPRAY 1/8NPTX1 316SST | New OEM | Contact Us |
| 975002 | CMP | Speedfam | NOZZLE,SPRAY 1/8NPT #5 316SST | New OEM | Contact Us |
| 975003 | CMP | Speedfam | FTG,ADJUSTABLE BALL 1/8NPTX1/8NPT 316SST | New OEM | Contact Us |
| 975377 | CMP | Speedfam | SNSR,PROX 8MMDIA 2MM RNG NPN 3WIRE | New OEM | Contact Us |