Spare Parts
Intertec Group取得CPS Lam 亞洲區獨家代理，可提供下列系列之設備原廠全新零組件:
? Novellus: Concept One (C1D, C1W)
? Gasonics: PEP Series(3510, 3010, Iridia), L Series (3510, 3500), A Series (1000, 3000, 3010).
? Speedfam-IPEC: 372/472, 676/776, Auriga, MV200.
| Part Number | Tool Type | OEM | Description | Condition | Offer |
|---|---|---|---|---|---|
| 962942 | CMP | Speedfam | SPACER,ACTIVE WAND MV | New OEM | Contact Us |
| 962943 | CMP | Speedfam | STOPPER,ACTIVE WAND MV | New OEM | Contact Us |
| 963513 | CMP | Speedfam | SHIELD,SPIN CHUCK GRIPPER LABYRINTH MV | New OEM | Contact Us |
| 964021 | CMP | Speedfam | CONTACT,PIN 22-26AWG 0.067MAX INS DIA | New OEM | Contact Us |
| 964177 | CMP | Speedfam | POWER SUPPLY,24VDC 50A 1200WATTS | New OEM | Contact Us |
| 964197 | CMP | Speedfam | POWER SUPPLY, 24VDC 25A 1200W DUAL STRAP | New OEM | Contact Us |
| 964225 | CMP | Speedfam | NUT, BULKHEAD EXTENDED SPRAYRING 676/776nder | New OEM | Contact Us |
| 964226 | CMP | Speedfam | ADAPTER,DRIVELINE ENDPOINT 676/776 | New OEM | Contact Us |
| 964227 | CMP | Speedfam | DRIVE,LINE ENDPOINT & APM | New OEM | Contact Us |
| 964260 | CMP | Speedfam | MANF,10 STATION 5/16"IN X 5/32"OUT | New OEM | Contact Us |
| 964270 | CMP | Speedfam | GENERATOR,VACUUM TEFLON 2.22 SCFM | New OEM | Contact Us |
| 964272 | CMP | Speedfam | VALVE,24VDC 2POS SGL 10-32PORT 5/3PILOT | New OEM | Contact Us |
| 964427 | CMP | Speedfam | ASSY,SPIN CHUCK GRIPPER MV | New OEM | Contact Us |
| 964464 | CMP | Speedfam | SLEEVE,PISTON ACTIVE WAND MV | New OEM | Contact Us |
| 964484 | CMP | Speedfam | REGULATOR,AIR 1/4MNPT 7-100PSIG RLV SST | New OEM | Contact Us |
| 964506 | CMP | Speedfam | DISK, SPIN CHUCK GRIPPER MV | New OEM | Contact Us |
| 964507 | CMP | Speedfam | FINGER,SPIN CHUCK GRIPPER MV | New OEM | Contact Us |
| 964508 | CMP | Speedfam | FINGER,SPIN CHUCK GRIPPER MOUNT MV | New OEM | Contact Us |
| 964509 | CMP | Speedfam | PIN,FINGER SPIN CHUCK GRIPPER MV | New OEM | Contact Us |
| 964511 | CMP | Speedfam | POST,SPIN CHUCK GRIPPER O-RING MV | New OEM | Contact Us |
| 964512 | CMP | Speedfam | SHAFT, SPIN CHUCK GRIPPER MV | New OEM | Contact Us |
| 964513 | CMP | Speedfam | SHIELD,SPIN CHUCK GRIPPER LABYRINTH MV | New OEM | Contact Us |
| 964566 | CMP | Speedfam | MTR,RODLESS CYLINDER 1.75AMP 24V | New OEM | Contact Us |
| 964651 | CMP | Speedfam | CARD,DUAL ETHERNET RJ45 PCI | New OEM | Contact Us |
| 964656 | CMP | Speedfam | CARD,CNTRLR ADEPT SMIF LPO | New OEM | Contact Us |
| 964657 | CMP | Speedfam | ACTUATOR,POD LOCK ADEPT SMIF LPO | New OEM | Contact Us |
| 964663 | CMP | Speedfam | CYLINDER,AIR TOWER LIFT ADEPT SMIF LPO | New OEM | Contact Us |
| 964664 | CMP | Speedfam | VALVE,SOLENOID AIR ADEPT SMIF LPO | New OEM | Contact Us |
| 964665 | CMP | Speedfam | SENSOR,CAPACITIVE 12M 8MM UNSHIELDED | New OEM | Contact Us |
| 964666 | CMP | Speedfam | AMPL,300MA 10-35VDC SUPPLY | New OEM | Contact Us |
| 964679 | CMP | Speedfam | C/A,FIBER OPTIC ZONE 2&3 SOLID PLATEN MV | New OEM | Contact Us |
| 964695 | CMP | Speedfam | HOUSING,POST SPIN CHUCK GRIPPER MV | New OEM | Contact Us |
| 964744 | CMP | Speedfam | ARM,ANTI ROTATION MV | New OEM | Contact Us |
| 964787 | CMP | Speedfam | UPPER BRACKETS | New OEM | Contact Us |
| 964837 | CMP | Speedfam | PLATE,WEAR RING BACKING CARRIER #11 MV | New OEM | Contact Us |
| 964839 | CMP | Speedfam | CLAMP,DIAPHRAGM INNER WEAR RING C11 MV | New OEM | Contact Us |
| 964841 | CMP | Speedfam | CLAMP,DIAPHRAGM OUTER WEAR RING #11 MV | New OEM | Contact Us |
| 964846 | CMP | Speedfam | DIAPHRAGM,WEAR RING CARRIER #11 MV | New OEM | Contact Us |
| 964924 | CMP | Speedfam | CYLINDER, AIR TOWER LOCK ADEPT SMIF LPO | New OEM | Contact Us |
| 964943 | CMP | Speedfam | CABLE,E/P REGULATOR RIGHT ANGLE | New OEM | Contact Us |
| 964962 | CMP | Speedfam | SHAFT,WAFER SENSOR ACTIVE WAND MV | New OEM | Contact Us |
| 964963 | CMP | Speedfam | TARGET,WAFER SENSOR ACTIVE WAND MV | New OEM | Contact Us |
| 964994 | CMP | Speedfam | TUBING,PUR 5/32 RED TRANSLUCENT | New OEM | Contact Us |
| 964995 | CMP | Speedfam | TUBING,PUR 5/32 ORANGE TRANSLUCENT | New OEM | Contact Us |
| 964996 | CMP | Speedfam | TUBING,PUR 5/32 PURPLE TRANSLUCENT | New OEM | Contact Us |
| 964997 | CMP | Speedfam | TUBING,PUR 5/32 CLEAR | New OEM | Contact Us |
| 964998 | CMP | Speedfam | TUBING,PUR 5/32 AQUA BLUE TRANSLUCENT | New OEM | Contact Us |
| 964999 | CMP | Speedfam | TUBING,PUR 5/32 BLUE TRANSLUCENT | New OEM | Contact Us |
| 965019 | CMP | Speedfam | TUBING,PUR 5/32 YELLOW TRANSLUCENT | New OEM | Contact Us |
| 965042 | CMP | Speedfam | CABLE, PS/2 CPU TO SERVSWITCH 10FT | New OEM | Contact Us |
| 965287 | CMP | Speedfam | POWER SUPPLY,90-260VAC IN 24VDC 1A OUT | New OEM | Contact Us |
| 965400 | CMP | Speedfam | VALVE,DIAPHRAGM,VACUUM TANK | New OEM | Contact Us |
| 965404 | CMP | Speedfam | SHAFT,PISTON,LOAD/UNLOAD CUP | New OEM | Contact Us |
| 965406 | CMP | Speedfam | SHAFT,GUIDE,LOWER | New OEM | Contact Us |
| 965485 | CMP | Speedfam | FINGER,GRIPPER,200MM,STYLE B | New OEM | Contact Us |
| 965487 | CMP | Speedfam | FINGER, GRIPPER, 200MM, STYLE A | New OEM | Contact Us |
| 966099 | CMP | Speedfam | SNSR,PROX 8MM THD SHLD 1.5MM RNG NPN | New OEM | Contact Us |
| 966130 | CMP | Speedfam | PAD, WET, VACUUM | New OEM | Contact Us |
| 966158 | CMP | Speedfam | BELT,TIMING,T5 78 TEETH | New OEM | Contact Us |
| 966246 | CMP | Speedfam | BATTERY | New OEM | Contact Us |
| 966260 | CMP | Speedfam | AC SERVO MOTOR(U AXIS) | New OEM | Contact Us |
| 966318 | CMP | Speedfam | SENSOR, CYL, 2ND PAD COND | New OEM | Contact Us |
| 966422 | CMP | Speedfam | VALVE,WET VACUUM | New OEM | Contact Us |
| 966423 | CMP | Speedfam | VALVE,DRY VACUUM | New OEM | Contact Us |
| 966440 | CMP | Speedfam | CABLE, MTR.PWR, RLR, BOX2 SCRUB | New OEM | Contact Us |
| 966487 | CMP | Speedfam | TRANSDUCER, SMC | New OEM | Contact Us |
| 966545 | CMP | Speedfam | GENERATOR,VACUUM,.5 I.D. | New OEM | Contact Us |
| 966716 | CMP | Speedfam | SENSOR,ASSY,WAFER PRESENT | New OEM | Contact Us |
| 966867 | CMP | Speedfam | BLOCK,STOPPER 7700J | New OEM | Contact Us |
| 966881 | CMP | Speedfam | HOLDER,SHAFT 7700J | New OEM | Contact Us |
| 966883 | CMP | Speedfam | PLATE,MTR 3 7700J | New OEM | Contact Us |
| 966884 | CMP | Speedfam | PULLY,1 MOD 7700J | New OEM | Contact Us |
| 966885 | CMP | Speedfam | PULLY,2 MOD 7700J | New OEM | Contact Us |
| 966887 | CMP | Speedfam | SPINDLE,1 7700J | New OEM | Contact Us |
| 966888 | CMP | Speedfam | COVER,BEARING (A) 7700J | New OEM | Contact Us |
| 966889 | CMP | Speedfam | COLLAR,LABYRINTH | New OEM | Contact Us |
| 966890 | CMP | Speedfam | HOUSING,SEAL (A) 7700J | New OEM | Contact Us |
| 966892 | CMP | Speedfam | COVER,MTR 7700J | New OEM | Contact Us |
| 966893 | CMP | Speedfam | FLANGE,SEAL 1 7700J | New OEM | Contact Us |
| 966894 | CMP | Speedfam | SEAL,RING | New OEM | Contact Us |
| 966895 | CMP | Speedfam | SEAL,FLANGE 2 7700J | New OEM | Contact Us |
| 966896 | CMP | Speedfam | CAP,A | New OEM | Contact Us |
| 966897 | CMP | Speedfam | GUARD,TUBE | New OEM | Contact Us |
| 966899 | CMP | Speedfam | HOLDER,NOZZLE (1) | New OEM | Contact Us |
| 966900 | CMP | Speedfam | HOLDER,NOZZLE (2) | New OEM | Contact Us |
| 966902 | CMP | Speedfam | NOZZLE,(A) 7700J | New OEM | Contact Us |
| 966903 | CMP | Speedfam | BELLOW,UPPER BRUSH ARM,7700J | New OEM | Contact Us |
| 966906 | CMP | Speedfam | COLLAR,3 | New OEM | Contact Us |
| 966907 | CMP | Speedfam | COLLAR,4 | New OEM | Contact Us |
| 966940 | CMP | Speedfam | HOLDER, BEARING (B) 7700J | New OEM | Contact Us |
| 966965 | CMP | Speedfam | Bellows B 7700J | New OEM | Contact Us |
| 966968 | CMP | Speedfam | Holder Pad B 7700J | New OEM | Contact Us |
| 966970 | CMP | Speedfam | Housing Seal B 7700J | New OEM | Contact Us |
| 966971 | CMP | Speedfam | SEAL,1 7700J | New OEM | Contact Us |
| 966973 | CMP | Speedfam | SPACER,R | New OEM | Contact Us |
| 966974 | CMP | Speedfam | CASE,BEARING 7700J | New OEM | Contact Us |
| 966975 | CMP | Speedfam | SHAFT,MAIN (B) 7700J | New OEM | Contact Us |
| 966976 | CMP | Speedfam | STAND,MAIN (B) 7700J | New OEM | Contact Us |
| 966977 | CMP | Speedfam | COVER,BEARING D 7700J | New OEM | Contact Us |
| 967000 | CMP | Speedfam | RING, IDLER 7700J | New OEM | Contact Us |